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·POSITION:ProductsTypeElectronic-grade → Tetraethyl orthosilicate(electronic grade)

Tetraethyl orthosilicate(electronic grade)

Tetraethyl orthosilicate(electronic grade)
  • Product Code:BOSIL-781
  • CAS No.:78-10-4
  • Effective Content:≥99.9%
  • Appearance:Colorless clear liquid
  • Packaging:to be checked with Bluesky
  • Net Weight:to be checked with Bluesky
Product Description

Product Information

Product Code:BOSIL-781

Chemical Name:Tetraethyl orthosilicate (electronic grade)

Molecular Formula: C8H20O4Si

Molecular Weight: 208.33

CAS No.: 78-10-4

Properties and Reactivity

Electronic grade tetraethyl orthosilicate(TEOS), mainly used in the CVD process of IC wafer manufacturing, the purity requirements are very strict, the purity needs to be more than 8N, and the impurities need to be less than 1 ppb, especially metal ion impurities (Na, K, Mg, Fe, Ca, Al, etc.), metal ions are electroactive impurities. It will reduce the insulation performance of the silicon dioxide thin film layer deposited in the semiconductor device, which will lead to the interconnection of micron-scale circuits, resulting in the scrap of the circuit board. The total cation content and total chlorine content of tetraethoxysilane produced by the direct method are very low, and the conditions of processing tetraethoxysilane into electronic grade are complete.


Technical Data


Note: the above data is for reference only, cannot be as a technical specification.


BOSIL-781 is primarily used as a CVD process in wafer manufacturing. It is used to produce silicon dioxide thin films and is an electronic chemical required for the manufacture of semiconductors, discrete devices and micro-electromechanical systems.

BOSIL-781 is used in the semiconductor industry to produce high quality abrasive particles.

BOSIL-781 can be used as non-chlorine or ultra-low chlorine insulation heat resistant material.


  This product information, as well as all technical advice, is based on our current level of experience and knowledge. We do not accept any legal responsibility, including the known third party intellectual property rights. In particular, we do not make any guarantee or warranty of the product properties in a legal sense. We reserve the right to any changes to this product made by technological progress or further development. Customers who use this product should conduct their own careful testing and inspecting. This description of the product properties should also be verified by professional testing through the customers who use this product. The reference codes of other companies are not recommended but not excluded the availability of similar products.
  The guarantee from Hubei BlueSky is that the products ex BlueSky meets the sales specifications.
  The remediation for the breach of the warranty from Hubei BlueSky is limited to refund the payment or the replacement of product that does not subject to the warranty.
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