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·POSITION:ProductsGroupSilicate → Tetramethoxysilane (electronic grade)

Tetramethoxysilane (electronic grade)

Tetramethoxysilane (electronic grade)
  • Product Code:BOSIL-681
  • CAS No.:681-84-5
  • Effective Content:≥99.5%
  • Appearance:Colorless transparent liquid
  • Packaging:DRUM
  • Net Weight:200KG
Product Description

Product Information

Product Code:BOSIL-681

Chemical Name:Tetramethoxysilane (electronic grade) 

Molecular Formula:C4H12O4Si

Molecular Weight:152

CAS No.: 681-84-5


Properties and Reactivity

Tetramethoxysilane can be hydrolyzed to form silica grinding particles (silica sol), which has good dispersion and selectivity, strong activity, and is easy to deal with the waste liquid cleaned during the process, and is often used for polishing the dielectric layer between silicon and SiO2 layers.

Tetramethoxysilane has a higher silica content than tetraethoxysilane, and it is cheaper to make silica grinding particles.


Technical data


Note: The above data are for reference only, can not be used as a technical specification.


 BOSIL-681 can be used as intermediate in sol-gel reaction.

 BOSIL-681 can be used as non-chlorine or ultra-low chlorine insulation heat resistant material.

 BOSIL-681 is used in the semiconductor industry to produce high quality abrasive particles.

◆ Tetramethoxysilane has higher silica content and higher cost performance than tetraethoxysilane, and is suitable for preparing semiconductor CVD process.


Shelf life

Sealed storage, shelf life 12 months. The container should be sealed after opening to prevent water vapor from entering and producing hydrolysis.

  This product information, as well as all technical advice, is based on our current level of experience and knowledge. We do not accept any legal responsibility, including the known third party intellectual property rights. In particular, we do not make any guarantee or warranty of the product properties in a legal sense. We reserve the right to any changes to this product made by technological progress or further development. Customers who use this product should conduct their own careful testing and inspecting. This description of the product properties should also be verified by professional testing through the customers who use this product. The reference codes of other companies are not recommended but not excluded the availability of similar products.
  The guarantee from Hubei BlueSky is that the products ex BlueSky meets the sales specifications.
  The remediation for the breach of the warranty from Hubei BlueSky is limited to refund the payment or the replacement of product that does not subject to the warranty.
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