Chemical Name：Tetramethoxysilane (electronic grade)
CAS No.： 681-84-5
Properties and Reactivity
Tetramethoxysilane can be hydrolyzed to form silica grinding particles (silica sol), which has good dispersion and selectivity, strong activity, and is easy to deal with the waste liquid cleaned during the process, and is often used for polishing the dielectric layer between silicon and SiO2 layers.
Tetramethoxysilane has a higher silica content than tetraethoxysilane, and it is cheaper to make silica grinding particles.
Note: The above data are for reference only, can not be used as a technical specification.
◆ BOSIL-681 can be used as intermediate in sol-gel reaction.
◆ BOSIL-681 can be used as non-chlorine or ultra-low chlorine insulation heat resistant material.
◆ BOSIL-681 is used in the semiconductor industry to produce high quality abrasive particles.
◆ Tetramethoxysilane has higher silica content and higher cost performance than tetraethoxysilane, and is suitable for preparing semiconductor CVD process.
Sealed storage, shelf life 12 months. The container should be sealed after opening to prevent water vapor from entering and producing hydrolysis.